MEMS fabrication infrared heater

Sun, 07 Jun 2026 03:53:19 +0800

On the MEMS line, temperature variance isn’t just a parameter—it’s a yield killer. In lithography, if your soft bake or hard bake drifts even a fraction of a degree, you spread critical dimensions across the wafer and scrap devices before they ever leave the track. We built our infrared heater for that reality. What matters is repeatable heat, delivered clean. Our short-wave infrared emitter array puts energy straight into the wafer, fast, so thermal lag stays minimal. Across the hot zone, we hold wafer-level uniformity within ±0.1°C, so every photoresist bake hits the thermal budget without edge excursions. The heater body is quartz and high-purity ceramic, built for Class 1–100 cleanrooms. No particle burst on ramp-up, and the hot surface stays isolated from process airflow to keep contamination out. The payoff is photoresist profiles that are stable, predictable, and transferable from lot to lot. Control is what keeps you up and running. Sub-second temperature response shortens cycle time and cuts the time the wafer sits at elevated temperature. Energy use drops because heat comes on demand, with minimal standby loss. The system runs 24/7 without unplanned downtime, and the emitter life supports 5,000+ hours before output drift—spares go down, maintenance windows shrink. Better repeatability tightens CD control and lowers scrap. **Infrared heat is line-of-sight.**Mounting alignment and reflector geometry have to match the chamber and wafer path. We provide dimensional templates and thermal clearance maps, but integration is non-negotiable. Plan the mechanical envelope and cooling path early, and the heater will deliver the precision the process demands.

MEMS on Infrared Heat Element Corporation

MEMS fabrication infrared heater