http://ir-heat-element-corp.com/zh/tags/%E5%88%86%E5%8C%BA%E8%AE%BE%E5%AE%9A/ Recent content in 分区设定 on Infrared Heat Element Corporation Hugo zh Thu, 25 Jun 2026 04:50:25 +0800 http://ir-heat-element-corp.com/zh/posts/zoned-infrared-heating-module/ Thu, 25 Jun 2026 04:50:25 +0800 http://ir-heat-element-corp.com/zh/posts/zoned-infrared-heating-module/ <p><img src="http://ir-heat-element-corp.com/images/1764273a9805a56244015746cb190d47.png" alt="分区红外加热模块"></p> <p>在光刻工艺中，光阻烘烤过程中0.2℃的温度波动就足以破坏线条宽度的精确控制，进而影响产品的良率。传统的加热方式试图在保持温度均匀的同时又不超出设定的温度范围。而分区红外加热则是一种简单的解决方案。</p>