Vacuum compatible infrared heater
Cutting Waste in Semi-Fab: The Truth About IR Heating If we’re actually going to hit those carbon neutrality goals in semiconductor plants, we...
Vacuum chamber infrared heater
Out on the line, in a Class 1 cleanroom, a 300mm wafer settles onto the hot plate. Photoresist is set by temperature, not by wishful thinking. A 2°C...